The intrinsic metal–insulator transition (MIT) of VO2 films near room temperature presents significant potential for reconfigurable metamaterials in the terahertz (THz) frequency range. While previous designs primarily focused on changes in electrical conductivity across the MIT, the accompanying dielectric changes due to the mesoscopic carrier confinement effect have been largely unexplored. In this study, we integrate asymmetric split-ring resonators on 35 nm epitaxial VO2 film and identify a “dielectric window” at the early stages of the MIT. This is characterized by a redshift in the resonant frequency without a significant degradation in the resonant quality. This phenomenon is attributed to an inhomogeneous phase transition in the VO2 film, which induces a purely dielectric change at the onset of the MIT, while the electrical conductivity transition occurs later, slightly above the percolation threshold. Our findings provide deeper insights into the THz properties of VO2 films and pave the way for dielectric-based, VO2 hybrid reconfigurable metamaterials.
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